JPH0432564Y2 - - Google Patents

Info

Publication number
JPH0432564Y2
JPH0432564Y2 JP1986090405U JP9040586U JPH0432564Y2 JP H0432564 Y2 JPH0432564 Y2 JP H0432564Y2 JP 1986090405 U JP1986090405 U JP 1986090405U JP 9040586 U JP9040586 U JP 9040586U JP H0432564 Y2 JPH0432564 Y2 JP H0432564Y2
Authority
JP
Japan
Prior art keywords
light
sensor
emitting element
light emitting
receiving element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986090405U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62201001U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986090405U priority Critical patent/JPH0432564Y2/ja
Publication of JPS62201001U publication Critical patent/JPS62201001U/ja
Application granted granted Critical
Publication of JPH0432564Y2 publication Critical patent/JPH0432564Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP1986090405U 1986-06-13 1986-06-13 Expired JPH0432564Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986090405U JPH0432564Y2 (en]) 1986-06-13 1986-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986090405U JPH0432564Y2 (en]) 1986-06-13 1986-06-13

Publications (2)

Publication Number Publication Date
JPS62201001U JPS62201001U (en]) 1987-12-22
JPH0432564Y2 true JPH0432564Y2 (en]) 1992-08-05

Family

ID=30950233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986090405U Expired JPH0432564Y2 (en]) 1986-06-13 1986-06-13

Country Status (1)

Country Link
JP (1) JPH0432564Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735708A (en) * 1980-08-13 1982-02-26 Mitsutoyo Mfg Co Ltd Measuring method of microscopic displacement and microscopic inclination

Also Published As

Publication number Publication date
JPS62201001U (en]) 1987-12-22

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